Digital Holography for MEMS and Microsystem Metrology |
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| Author:
| Asundi, Anand |
| Series title: | The Wiley Microsystem and Nanotechnology Ser. |
| ISBN: | 978-0-470-97869-6 |
| Publication Date: | Aug 2011 |
| Publisher: | John Wiley & Sons, Incorporated
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| Book Format: | Hardback |
| List Price: | USD $139.95 |
Book Description:
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By taking a practical approach to the industrial inspection of digital holography, Digital Holography for MEMS and Microsystem Metrology offers a description of the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection.
By taking a practical approach to the industrial inspection of digital holography, Digital Holography for MEMS and Microsystem Metrology offers a description of the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection.