High Permittivity Gate Dielectric Materials
|Series title:||Springer Series in Advanced Microelectronics Ser.|
|Publication Date:||Jul 2013|
| Book Format:||Hardback|
|List Price:||USD $179.00|
| Book Description: |
This book covers all aspects of the physics and the technology of high permittivity gate dielectric materials. Each chapter covers basic topics, reviews the literature, and details the research contributions of the author's group to the subject.