| Mass Spectrometric and Langmuir Probe Measurements in Inductively Coupled Plasmas in Ar, Chf3/Ar and Chf3/Ar/O2 Mixtures | | Created by:
| Nasa Technical Reports Server (Ntrs), | ISBN: | 978-1-287-28596-0 | Publication Date: | Aug 2013 | Publisher: | Creative Media Partners, LLC
| Imprint: | BiblioGov | Book Format: | Paperback | List Price: | USD $15.75 |
| |