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Poly-SiGe for MEMS-Above-CMOS Sensors - a book by Ruiz, Pilar Gonzalez

Poly-SiGe for MEMS-Above-CMOS Sensors

Poly-SiGe for MEMS-Above-CMOS Sensors( )
Author: Ruiz, Pilar Gonzalez
De Meyer, Kristin
Witvrouw, Ann
Series title:Springer Series in Advanced Microelectronics Ser.
Publication Date:Jul 2013
Book Format:Hardback
List Price:USD $129.00
Book Description:

Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for MEMS above-aluminum-backend CMOS integration has already been demonstrated. However, aggressive interconnect...
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Book Details
Detailed Subjects: Technology & Engineering / Electronics / Semiconductors
Technology & Engineering / Nanotechnology & Mems
Technology & Engineering / Sensors
Physical Dimensions (W X L X H):6.045 x 9.165 Inches
Book Weight:1.08 Pounds

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