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Sputtering Materials for VLSI and Thin Film Device... - a book by Sarkar, Jaydeep

Sputtering Materials for VLSI and Thin Film Devices

Sputtering Materials for VLSI and Thin Film Devices( )
Author: Sarkar, Jaydeep
Gilman, Paul S.
Publication Date:Oct 2013
Publisher:Elsevier Science & Technology Books
Imprint:William Andrew
Book Format:Hardback
List Price:USD $199.00
Book Description:

An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps...
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