The Physics of Moire Metrology |
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| Author:
| Kafri, Oded
Glatt, Ilana |
| Series title: | Wiley Series in Pure and Applied Optics Ser. |
| ISBN: | 978-0-471-50967-7 |
| Publication Date: | Jan 1990 |
| Publisher: | John Wiley & Sons, Incorporated
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| Imprint: | Wiley-Interscience |
| Book Format: | Hardback |
| List Price: | USD $182.00 |
Book Description:
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This one volume treatise presents a comprehensive discussion of moire metrology analysis. The authors work from a new point of view, treating the gratings used in moire analysis as an artificial analog to electromagnetic waves, thereby comparing moire analysis with conventional optical methods based on wave properties such as interferometry.
This one volume treatise presents a comprehensive discussion of moire metrology analysis. The authors work from a new point of view, treating the gratings used in moire analysis as an artificial analog to electromagnetic waves, thereby comparing moire analysis with conventional optical methods based on wave properties such as interferometry.