Trace Analysis of Specialty and Electronic Gases
||Raynor, Mark W.|
Geiger, William M.
|Publication Date:||Jul 2013|
| Publisher:||John Wiley & Sons, Incorporated|
| Book Format:||Ebook|
|List Price:||Contact Supplier contact
| Book Description: |
Explores the latest advances and applications of specialty and electronic gas analysis
The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry,...