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Trace Analysis of Specialty and Electronic Gases

Trace Analysis of Specialty and Electronic Gases( )
Editor: Raynor, Mark W.
Geiger, William M.
ISBN:978-1-118-64257-3
Publication Date:Jul 2013
Publisher:John Wiley & Sons, Incorporated
Book Format:Ebook
List Price:Contact Supplier contact
Book Description:

Explores the latest advances and applications of specialty and electronic gas analysis

The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry,...
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