Gettering and Defect Engineering in Semiconductor Technology GADEST '97 |
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Editor:
| Claeys, C. Vanhellemont, J. Richter, H. Kittler, M. |
Series title: | Solid State Phenomena Vols. 57-58 Ser. |
ISBN: | 978-3-908450-27-6 |
Publication Date: | Jun 1997 |
Publisher: | Trans Tech Publications, Limited
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Book Format: | Paperback |
List Price: | USD $270.00 |
Book Description:
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Defect control relies more and more upon advanced fabrication approaches such as the use of slow pulling rates and hydrogen annealing. Gettering techniques remain of key importance in enhancing the device yield.
Defect control relies more and more upon advanced fabrication approaches such as the use of slow pulling rates and hydrogen annealing. Gettering techniques remain of key importance in enhancing the device yield.