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Gettering and Defect Engineering in Semiconductor Technology

GADEST '97

Gettering and Defect Engineering in Semiconductor Technology( )
Editor: Claeys, C.
Vanhellemont, J.
Richter, H.
Kittler, M.
Series title:Solid State Phenomena Vols. 57-58 Ser.
ISBN:978-3-908450-27-6
Publication Date:Jun 1997
Publisher:Trans Tech Publications, Limited
Book Format:Paperback
List Price:USD $270.00
Book Description:

Defect control relies more and more upon advanced fabrication approaches such as the use of slow pulling rates and hydrogen annealing. Gettering techniques remain of key importance in enhancing the device yield.

Book Details
Pages:556
Detailed Subjects: Technology & Engineering / Electronics / Semiconductors
Physical Dimensions (W X L X H):6.63 x 9.75 Inches



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