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Gettering and Defect Engineering in Semiconductor Technology XIII

Gettering and Defect Engineering in Semiconductor Technology XIII( )
Editor: Kittler, Martin
Richter, H.
ISBN:978-3-03813-369-8
Publication Date:Oct 2009
Publisher:Trans Tech Publications, Limited
Book Format:Digital download and online
List Price:USD $390.00USD $198.00
Book Description:

GADEST 2009Selected, peer reviewed papers from the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009

Book Details
Pages:610



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