Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications |
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| Author:
| Khounsary, Ali
Dinger, Udo
Ota, Kazuya |
| Series title: | Proceedings of SPIE Ser. |
| ISBN: | 978-0-8194-5471-3 |
| Publication Date: | Nov 2004 |
| Publisher: | SPIE
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| Book Format: | Undefined |
| List Price: | AUD $150.70 |
Book Description:
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Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.