Etching in Microsystem Technology |
|
| Author:
| Köhler, Michael |
| ISBN: | 978-3-527-29561-6 |
| Publication Date: | Jun 1999 |
| Publisher: | Wiley-VCH Verlag GmbH
|
| Book Format: | Hardback |
| List Price: | AUD $395.00 |
Book Description:
|
Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e. , the chemical and physical solid-state properties of these materials, and their treatment.
Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e. , the chemical and physical solid-state properties of these materials, and their treatment.