Ion Implantation into Semiconductors, Oxides and Ceramics |
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| Editor:
| Svensson, B. G.
Atwater, H. A.
Lindner, J. K. N.
Hemment, P. L. F. |
| Series title: | European Materials Research Society Symposia Proceedings Ser. |
| ISBN: | 978-0-08-043613-5 |
| Publication Date: | Mar 1999 |
| Publisher: | Elsevier Science & Technology Books
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| Book Format: | Hardback |
| List Price: | AUD $394.00 |
Book Description:
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These proceedings contain the reviewed papers presented at the Symposium J on "Ion Implantation into Semiconductors, Oxides and Ceramics", which was held at the Spring Meeting of the European Materials Research Society in Strasbourg, France, 16-19, June 1998. The symposium attracted 110 contributions, with authors from 31 nations in 5 continents. It was thereby the largest in a series of E-MRS ion beam symposia, documenting the importance of ion beam techniques and research in this...
More Description
These proceedings contain the reviewed papers presented at the Symposium J on "Ion Implantation into Semiconductors, Oxides and Ceramics", which was held at the Spring Meeting of the European Materials Research Society in Strasbourg, France, 16-19, June 1998. The symposium attracted 110 contributions, with authors from 31 nations in 5 continents. It was thereby the largest in a series of E-MRS ion beam symposia, documenting the importance of ion beam techniques and research in this area.
The aim of this symposium was to provide a forum for the discussion of new results in the implantation of materials from three different classes: semiconductors, oxides and ceramics.