Optical Micro- And Nanometrology in Microsystems Technology 5-7 April 2006, Strasbourg, France |
|
| Author:
| Gorecki, Christophe
Asundi, Anand
Osten, Wolfgang |
| Series title: | Proceedings of SPIE Ser. |
| ISBN: | 978-0-8194-6244-2 |
| Publication Date: | Jul 2006 |
| Publisher: | SPIE
|
| Book Format: | Undefined |
| List Price: | AUD $150.70 |
Book Description:
|
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.