Optical Microlithography XXI 26-29 February 2008, San Jose, California, USA |
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| Author:
| Levinson, Harry
Dusa, Mircea |
| Series title: | Proceedings of SPIE Ser. |
| ISBN: | 978-0-8194-7109-3 |
| Publication Date: | Aug 2008 |
| Publisher: | SPIE
|
| Book Format: | Undefined |
| List Price: | AUD $150.70 |
Book Description:
|
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.