Optical Microlithography XXVII 25-27 February 2014 |
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| Author:
| Lai, Kafai
Erdmann, Andreas |
| Contribution by:
| SPIE (Society) Staff, |
| Series title: | Proceedings of SPIE Ser. |
| ISBN: | 978-0-8194-9975-2 |
| Publication Date: | May 2014 |
| Publisher: | SPIE
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| Book Format: | Undefined |
| List Price: | AUD $242.00 |
Book Description:
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Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.