Optical and EUV Lithography A Modeling Perspective |
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| Author:
| Erdmann, Andreas |
| Series title: | Press Monographs |
| ISBN: | 978-1-5106-3901-0 |
| Publication Date: | Apr 2021 |
| Publisher: | SPIE
|
| Book Format: | Paperback |
| List Price: | AUD $113.00 |
Book Description:
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Introduces interested students with backgrounds in physics, optics, computational engineering, mathematics, chemistry, material science, nanotechnology, and other areas to the fascinating field of lithographic techniques for nanofabrication. It should also help senior engineers and managers expand their knowledge of alternative methods and applications.
Introduces interested students with backgrounds in physics, optics, computational engineering, mathematics, chemistry, material science, nanotechnology, and other areas to the fascinating field of lithographic techniques for nanofabrication. It should also help senior engineers and managers expand their knowledge of alternative methods and applications.