Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing |
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| Author:
| Gao, Wei |
| Series title: | Springer Series in Advanced Manufacturing Ser. |
| ISBN: | 978-1-84996-253-7 |
| Publication Date: | Aug 2010 |
| Publisher: | Springer
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| Book Format: | Hardback |
| List Price: | AUD $415.95 |
Book Description:
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This book describes the latest optical sensors used to measure angle and displacement in precision nanometrology, and presents scanning-type measuring systems for use in surface forms and stage motions. Coverage includes algorithms and experimental data.
This book describes the latest optical sensors used to measure angle and displacement in precision nanometrology, and presents scanning-type measuring systems for use in surface forms and stage motions. Coverage includes algorithms and experimental data.