Principles of Lithography |
|
| Author:
| Levinson, Harry J. |
| Series title: | Press Monograph Ser. |
| ISBN: | 978-0-8194-8324-9 |
| Publication Date: | Mar 2011 |
| Publisher: | SPIE
|
| Book Format: | Hardback |
| List Price: | AUD $146.30 |
Book Description:
|
Addresses topics directly related to manufacturing tools, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion lithography from development into volume manufacturing, and the movement of EUV lithography from the lab to development pilot lines. New references and homework problems are included.
Addresses topics directly related to manufacturing tools, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion lithography from development into volume manufacturing, and the movement of EUV lithography from the lab to development pilot lines. New references and homework problems are included.