Scanning Electron Microscopy Physics of Image Formation and Microanalysis |
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Author:
| Reichelt, Rudolf Reimer, Ludwig |
Editor:
| Reichelt, Rudolf |
ISBN: | 978-3-540-85317-6 |
Publication Date: | Nov 2010 |
Publisher: | Springer
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Book Format: | Hardback |
List Price: | AUD $341.95 |
Book Description:
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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.