Semiconductor Materials and Process Technology Handbook |
|
| Author:
| McGuire, Gary F. |
| Series title: | Materials Science and Process Technology Ser. |
| ISBN: | 978-0-8155-1150-2 |
| Publication Date: | Jan 1988 |
| Publisher: | Elsevier Science & Technology Books
|
| Imprint: | William Andrew |
| Book Format: | Hardback |
| List Price: | AUD $138.95 |
Book Description:
|
This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.
This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.