The Science and Engineering of Microelectronic Fabrication |
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| Author:
| Campbell, Stephen A. |
| Series title: | The Oxford Series in Electrical and Computer Engineering |
| ISBN: | 978-0-19-513605-0 |
| Publication Date: | May 2001 |
| Publisher: | Oxford University Press, Incorporated
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| Book Format: | Hardback |
| List Price: | AUD $77.50 |
Book Description:
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This is a revision of a main text for senior/graduate (4th and 5th yr.) courses taught in electrical engineering departments. The course is commonly called Microelectronic Fabrication or IC (Integrated Circuit) Fabrication, or Silicon Processing. The course teaches the students how to build the circuits they design in a Sedra/Smith type Microelectronics course. While Campbell's text covers both silicon and GaAs devices, the primary emphasis is on silicon devices. The revision path...
More DescriptionThis is a revision of a main text for senior/graduate (4th and 5th yr.) courses taught in electrical engineering departments. The course is commonly called Microelectronic Fabrication or IC (Integrated Circuit) Fabrication, or Silicon Processing. The course teaches the students how to build the circuits they design in a Sedra/Smith type Microelectronics course. While Campbell's text covers both silicon and GaAs devices, the primary emphasis is on silicon devices. The revision path focuses mostly on the expansion of topical coverage based on user and reviewer requests, with selected deletions to preserve the length. Additionally new manufacturing processes developed or emphasized since the publiation of the first edition will be included.