Ultra Clean Processing of Silicon Surfaces VII |
|
| Editor:
| Mertens, Paul
Meuris, Marc
Heyns, Marc |
| ISBN: | 978-3-908451-06-8 |
| Publication Date: | Jan 2005 |
| Publisher: | Trans Tech Publications, Limited
|
| Book Format: | Paperback |
| List Price: | AUD $525.95 |
Book Description:
|
This book is sub-divided into 10 different topical sections; each dealing with important issues in surface cleaning and preparation.
This book is sub-divided into 10 different topical sections; each dealing with important issues in surface cleaning and preparation.