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Atomic Layer Deposition for Semiconductors

Atomic Layer Deposition for Semiconductors( )
Editor: Hwang, Cheol Seong
ISBN:978-1-4614-8053-2
Publication Date:Oct 2013
Publisher:Springer
Book Format:Hardback
List Price:USD $129.00
Book Description:

This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines.

Book Details
Pages:263
Detailed Subjects: Technology & Engineering / General
Technology & Engineering / Electronics / Semiconductors
Physical Dimensions (W X L X H):6.045 x 9.165 Inches
Book Weight:1.272 Pounds

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