Advances in Metrology for X-Ray and EUV Optics II 30 August 2007, San Diego, California, USA |
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| Author:
| Assoufid, Lahsen
Takacs, Peter
Ohtsuka, Masaru |
| Series title: | Proceedings of SPIE Ser. |
| ISBN: | 978-0-8194-6852-9 |
| Publication Date: | Sep 2007 |
| Publisher: | SPIE
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| Book Format: | Undefined |
| List Price: | Contact Supplier contact
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Book Description:
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Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.