Advances in Metrology for X-Ray and EUV Optics V |
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| Editor:
| Assoufid, Lahsen
Ohashi, Haruhiko
Asundi, Anand |
| ISBN: | 978-1-62841-233-8 |
| Publication Date: | Oct 2014 |
| Publisher: | SPIE
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| Book Format: | Undefined |
| List Price: | Contact Supplier contact
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Book Description:
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Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.