Artificially Induced Grain Alignment in Thin Films: Volume 1150 |
|
| Editor:
| Matias, Vladimir
Hammond, Robert
Moon, Seung-Hyun
Hühne, Ruben |
| Series title: | MRS Proceedings Ser. |
| ISBN: | 978-1-60511-122-3 |
| Publication Date: | Nov 2009 |
| Publisher: | Cambridge University Press
|
| Book Format: | Hardback |
| List Price: | USD $119.00 |
Book Description:
|
The focus of this book is on physical vapor deposition methods for growth of inorganic thin films, with special attention paid to ion beam assisted deposition (IBAD) texturing. Topics include: milestones in IBAD texturing; IBAD texturing; IBAD long-length application and texturing by other techniques.
The focus of this book is on physical vapor deposition methods for growth of inorganic thin films, with special attention paid to ion beam assisted deposition (IBAD) texturing. Topics include: milestones in IBAD texturing; IBAD texturing; IBAD long-length application and texturing by other techniques.