| Chemical Mechanical Planarization in IC Device Manufacturing 2nd International Symposium | | Editor:
| Ali, I. Raghavan, S. Zhang, L. | Series title: | Proceedings Ser. | ISBN: | 978-1-56677-201-3 | Publication Date: | Oct 1998 | Publisher: | Electrochemical Society, The
| Book Format: | Hardback | List Price: | USD $50.00 |
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