Coherent Optical Metrology |
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| Author:
| Kowarschik, Richard
Tschudi, Theo
Wang, Lingli |
| Series title: | AKV Series in Optical Metrology Ser. |
| ISBN: | 978-3-527-40066-9 |
| Publication Date: | Dec 2003 |
| Publisher: | John Wiley & Sons, Incorporated
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| Book Format: | Hardback |
| List Price: | USD $165.00 |
Book Description:
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The demands on new technologies with respect to accuracy, performance and reliability are steadily increasing with the complexitiy of both, the production processes and the geometry of components and tools. The development of improved manufacturing technologies and production processes requires powerful measurement and testing tools. Here, optical metrologies offer high accuracy and resolution, fast data acquisition, high information density and more flexibility. This handbook...
More DescriptionThe demands on new technologies with respect to accuracy, performance and reliability are steadily increasing with the complexitiy of both, the production processes and the geometry of components and tools. The development of improved manufacturing technologies and production processes requires powerful measurement and testing tools. Here, optical metrologies offer high accuracy and resolution, fast data acquisition, high information density and more flexibility. This handbook provides a most topical and comprehensive survey on methods and tools for optical metrology and point out their areas of application. The authors address the practical user. Experimental details and practical applications are brought into focus. Detailed information on materials, optical and mechanical components and evaluation methods make this book a must for every lab. Extensive references complete the work.