Copper -- Fundamental Mechanisms for Microelectronic Applications |
|
Author:
| Murarka, Shyam P. Verner, Igor V. Gutmann, Ronald J. |
ISBN: | 978-0-471-25256-6 |
Publication Date: | Apr 2000 |
Publisher: | John Wiley & Sons, Incorporated
|
Imprint: | Wiley-Interscience |
Book Format: | Hardback |
List Price: | USD $190.00 |
Book Description:
|
While aluminum is used for microelectronic applications at present, many researchers believe that copper′s superior performance will make it the substance of choice for future integrated circuits. This book presents for the first time the fundamentals and application of copper in electronic materials.
While aluminum is used for microelectronic applications at present, many researchers believe that copper′s superior performance will make it the substance of choice for future integrated circuits. This book presents for the first time the fundamentals and application of copper in electronic materials.