Design and Manufacturing of Active Microsystems |
|
| Editor:
| Büttgenbach, Stephanus
Burisch, Arne
Hesselbach, Jürgen |
| Series title: | Microtechnology and MEMS Ser. |
| ISBN: | 978-3-642-12903-2 |
| Publication Date: | Mar 2011 |
| Publisher: | Springer
|
| Book Format: | Ebook |
| List Price: | USD $239.00 |
Book Description:
|
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516 where the focus is on active micro systems based on the electromagnetic actuator principle.
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516 where the focus is on active micro systems based on the electromagnetic actuator principle.