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Device and Process Technologies for MEMS and Microelectronics

Device and Process Technologies for MEMS and Microelectronics( )
Author: Chau, Kevin H.
Dimitrijev, Sima
Series title:Proceedings of SPIE Ser.
ISBN:978-0-8194-3493-7
Publication Date:Oct 1999
Publisher:SPIE
Book Format:Undefined
List Price:Contact Supplier contact
Book Details
Pages:402
Detailed Subjects: Technology & Engineering / Electronics / Microelectronics
Physical Dimensions (W X L X H):8.19 x 10.53 Inches
Book Weight:1.995 Pounds



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