Diffusion in Semiconductors and Non-Metallic Solids |
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| Contribution by:
| Beke, D. L.
Allen, C. E.
Bracht, H.
Bruff, C. M.
D'Heurle, F. M.
Dutt, M. B.
Erdelyi, G.
Gas, P.
Sharma, B. L.
Stolwijk, N. A.
Murch, G. E.
Seebauer, E. G. |
| Editor:
| Beke, D. L. |
| Series title: | Landolt-Börnstein: Numerical Data and Functional Relationships in Science and Technology - New Ser. |
| ISBN: | 978-3-540-60964-3 |
| Publication Date: | Mar 1998 |
| Publisher: | Springer Berlin / Heidelberg
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| Imprint: | Springer |
| Book Format: | Mixed media product |
| List Price: | USD $3522.00 |
Book Description:
|
Subvolume A of two subvolumes on
Diffusion in Semiconductors and Non-Metallic Solids consists of a comprehensive and critical compilation of data for the following materials and properties: diffusion in silicon, germanium and their alloys, diffusion in compound semiconductors, diffusion in silicides, chemical diffusion in bulk inhomogeneous semiconductors, grain-boundary and dislocation diffusion in semiconductors and silicides and surface diffusion on semiconductors....
More DescriptionSubvolume A of two subvolumes on Diffusion in Semiconductors and Non-Metallic Solids consists of a comprehensive and critical compilation of data for the following materials and properties: diffusion in silicon, germanium and their alloys, diffusion in compound semiconductors, diffusion in silicides, chemical diffusion in bulk inhomogeneous semiconductors, grain-boundary and dislocation diffusion in semiconductors and silicides and surface diffusion on semiconductors. Although most of the silicides are not semiconducting, this chapter is included here because a number of them have become integrated in the Si technology and because they were not covered in the previous volume III/26 on diffusion in metallic substances. Subvolume A contains a CD-ROM.