| Electrochemical Processing in ULSI and MEMS 3 | | | Compiled by:
| Electrochemical Society ( ECS ) Staff, | | Editor:
| Dukovic, J. | | Series title: | ECS Transactions Ser. | | ISBN: | 978-1-60423-884-6 | | Publication Date: | Jan 2008 | | Publisher: | Curran Associates, Incorporated
| | Book Format: | Paperback | | List Price: | USD $105.00 |
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