Epitaxy of Semiconductors Introduction to Physical Principles |
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| Author:
| Pohl, Udo W. |
| Series title: | Graduate Texts in Physics Ser. |
| ISBN: | 978-3-642-32970-8 |
| Publication Date: | Jan 2013 |
| Publisher: | Springer Berlin / Heidelberg
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| Imprint: | Springer |
| Book Format: | Ebook |
| List Price: | USD $89.95 |
Book Description:
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This book explores structural and electronic properties of strained epitaxial layers and the thermodynamics and kinetics of layer growth, and describes such growth techniques as metalorganic vapor phase epitaxy, molecular beam epitaxy and liquid phase epitaxy.
This book explores structural and electronic properties of strained epitaxial layers and the thermodynamics and kinetics of layer growth, and describes such growth techniques as metalorganic vapor phase epitaxy, molecular beam epitaxy and liquid phase epitaxy.