| Etching in Chlorine Discharges Using an Integrated Feature Evolution-Plasma Model | | Author:
| Hwang, Helen H. | Created by:
| Nasa Technical Reports Server (Ntrs), Et Al, | ISBN: | 978-1-289-29119-8 | Publication Date: | Aug 2013 | Publisher: | Creative Media Partners, LLC
| Imprint: | BiblioGov | Book Format: | Paperback | List Price: | USD $15.75 |
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