Fabrication of Sige HBT BiCMOS Technology

Drawn from the comprehensive and well-reviewed Silicon Heterostructure Handbook, this book examines the design, fabrication, and application of silicon heterostructure transistors. Bringing together the scattered literature into a single source, the book focuses on SiGe HBT BiCMOS and Si/SiGe CMOS technologies. ''Snapshot'' views of the industrial state-of-the-art provide a basis of comparison for the current status and future course of the industry. Topics include materials,...
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Drawn from the comprehensive and well-reviewed Silicon Heterostructure Handbook, this book examines the design, fabrication, and application of silicon heterostructure transistors. Bringing together the scattered literature into a single source, the book focuses on SiGe HBT BiCMOS and Si/SiGe CMOS technologies. ''Snapshot'' views of the industrial state-of-the-art provide a basis of comparison for the current status and future course of the industry. Topics include materials, transistor optimization, fabrication, devices, structural innovations, modeling, and simulation, and potential markets. This text is ideal for scientists, graduate students, technical managers, and other professionals in the semiconductor industry.