Gettering Anf Defect Engineering in Semiconductor Technology - Gadest 2001 |
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| Editor:
| Raineri, V.
Priolo, F.
Kittler, M.
Richter, H. |
| Series title: | Solid State Phenomena Vols. 82-84 Ser. |
| ISBN: | 978-3-908450-64-1 |
| Publication Date: | Jan 2002 |
| Publisher: | Trans Tech Publications, Limited
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| Book Format: | Paperback |
| List Price: | USD $364.00 |
Book Description:
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Gettering and Defect Engineering in Semiconductor Technology are discussed here, with particular emphasis being placed on device applications. Fundamental aspects, as well as technological problems which are associated with defects in electronic materials and devices, are addressed. The topics in this volume were selected on the basis that single-crystal Si, and Si-based, semiconductors will dominate microelectronics until far into the 21st century. The main reason for the overwhelming...
More DescriptionGettering and Defect Engineering in Semiconductor Technology are discussed here, with particular emphasis being placed on device applications. Fundamental aspects, as well as technological problems which are associated with defects in electronic materials and devices, are addressed. The topics in this volume were selected on the basis that single-crystal Si, and Si-based, semiconductors will dominate microelectronics until far into the 21st century. The main reason for the overwhelming success of silicon technology is economic: the production cost per area increases by a factor of 5, or even 10, on going from 200 mm Si wafers to compound semiconductors or other substrate materials.