| Handbook of Silicon Wafer Cleaning Technology, 2nd Edition | | | Editor:
| Reinhardt, Karen
Kern, Werner | | ISBN: | 978-1-4933-0343-4 | | Publication Date: | Jan 2008 | | Publisher: | Elsevier - Health Sciences Division
| | Imprint: | Mosby Limited | | Book Format: | Paperback | | List Price: | USD $310.00 |
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