| In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing | | | Author:
| Amberiadis, Kostas
Kissinger, Gudrun
Okumura, Katsuya
Pabbisetty, Seshu V. | | Editor:
| Weiland, Larg H. | | Series title: | Proceedings of SPIE Ser. | | ISBN: | 978-0-8194-3223-0 | | Publication Date: | Apr 1999 | | Publisher: | SPIE
| | Book Format: | Undefined | | List Price: | Contact Supplier contact
|
| |