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Introduction to MEMS

Introduction to MEMS( )
Author: Chiao, Jung-Chih
Chiao, Mu
Contribution by: Thornton, Mitchell
Series title:Synthesis Lectures on Digital Circuits and Systems Ser.
ISBN:978-1-59829-653-2
Publication Date:Oct 2012
Publisher:Morgan & Claypool Publishers
Book Format:Paperback
List Price:USD $40.00


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