Ion-Solid Interactions Fundamentals and Applications |
|
| Author:
| Nastasi, Michael A.
Mayer, James
Hirvonen, James K. |
| Contribution by:
| Clarke, D. R.
Suresh, S.
Ward, I. M. |
| Series title: | Cambridge Solid State Science Ser. |
| ISBN: | 978-0-521-61606-5 |
| Publication Date: | Dec 2004 |
| Publisher: | Cambridge University Press
|
| Book Format: | Paperback |
| List Price: | USD $117.00 |
Book Description:
|
This book describes how materials, from semiconductors to tool steels, can be modified to create new materials. Its importance is that it is the first book in two decades to describe completely the implantation process which is used universally in semiconductor production.
This book describes how materials, from semiconductors to tool steels, can be modified to create new materials. Its importance is that it is the first book in two decades to describe completely the implantation process which is used universally in semiconductor production.