| Lithography | | | Editor:
| Landis, Stefan | | ISBN: | 978-1-84821-202-2 | | Publication Date: | Dec 2010 | | Publisher: | John Wiley & Sons, Incorporated
| | Imprint: | Wiley-ISTE | | Book Format: | Hardback | | List Price: | USD $190.95 | Book Description:
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- Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents
- A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
- Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents
- A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
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