Low Dielectric Constant Materials for IC Applications |
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| Editor:
| Ho, Paul S.
Lee, Wei William
Leu, Jihperng |
| Series title: | Springer Series in Advanced Microelectronics Ser. |
| ISBN: | 978-3-540-67819-9 |
| Publication Date: | Nov 2002 |
| Publisher: | Springer Berlin / Heidelberg
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| Imprint: | Springer |
| Book Format: | Hardback |
| List Price: | USD $169.99 |
Book Description:
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Low dielectric materials are an important component of microelectronic devices. In this carefully edited volume the leading researchers give an introduction to and a survey of the various fields of dielectrics for IC integration. The book appeals to materials reserachers, electrical engineers and advanced students.
Low dielectric materials are an important component of microelectronic devices. In this carefully edited volume the leading researchers give an introduction to and a survey of the various fields of dielectrics for IC integration. The book appeals to materials reserachers, electrical engineers and advanced students.