MEMS Silicon Oscillating Accelerometers and Readout Circuits |
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| Editor:
| Xu, Yong Ping |
| Series title: | River Publishers Series in Circuits and Systems Is a Series of Comprehensive Academic and Professional Books Which Focus on Theory and Applications of Circuit and Systems. This Includes Analog and Digital Integrated Circuits, Memory Technologies, System-On-chip and Processor Design. the Series Also Includes Books on Electronic Design Automation and Design Methodology, As Well As Computer Aided Des |
| ISBN: | 978-87-7022-044-6 |
| Publication Date: | Apr 2019 |
| Publisher: | River Publishers
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| Book Format: | Ebook |
| List Price: | USD $110.00 |
Book Description:
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Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output.
MEMS Silicon Oscillating...
More DescriptionMost MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output.
MEMS Silicon Oscillating Accelerometers and Readout Circuitsconsists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.