MEMS and NEMS Systems, Devices, and Structures |
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| Author:
| Lyshevski, Sergey Edward |
| Series title: | Nano- and Microscience, Engineering, Technology and Medicine Ser. |
| ISBN: | 978-0-8493-1262-5 |
| Publication Date: | Jan 2002 |
| Publisher: | CRC Press LLC
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| Book Format: | Hardback |
| List Price: | USD $185.00 |
Book Description:
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The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience. Focusing on the basic theory needed to design, develop, analyze, and prototype high-performance devices, components, and structures, it shows how...
More DescriptionThe technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience. Focusing on the basic theory needed to design, develop, analyze, and prototype high-performance devices, components, and structures, it shows how to analyze processes, phenomena, and properties at nano- and micro-scales and illustrates development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.