Metal-Dielectric Interfaces in Gigascale Electronics Thermal and Electrical Stability |
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| Author:
| He, Ming
Lu, Toh-Ming |
| Series title: | Springer Series in Materials Science Ser. |
| ISBN: | 978-1-4939-4308-1 |
| Publication Date: | Aug 2016 |
| Publisher: | Springer New York
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| Imprint: | Springer |
| Book Format: | Paperback |
| List Price: | USD $129.99USD $109.99 |
Book Description:
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This book presents a unified approach to understanding the diverse phenomena observed at metal-dielectric interfaces. It offers a clear account of the relationship between interface science and its applications in interconnect structures.
This book presents a unified approach to understanding the diverse phenomena observed at metal-dielectric interfaces. It offers a clear account of the relationship between interface science and its applications in interconnect structures.