Micro-Optics and Lithography

"This book is a thorough review of current techniques for the fabrication of micro-optical elements. It gives an overview of diffractive and refractive micro-optics and includes also guided wave micro-optics. Special attention is given to new techniques including deep etch lithography, like excimer lasers, LIGA and high energy ion irradiation." "The book is of interest for all scientists in both industry and academia who are working in the field of compact micro-optical systems. This...
More Description

"This book is a thorough review of current techniques for the fabrication of micro-optical elements. It gives an overview of diffractive and refractive micro-optics and includes also guided wave micro-optics. Special attention is given to new techniques including deep etch lithography, like excimer lasers, LIGA and high energy ion irradiation." "The book is of interest for all scientists in both industry and academia who are working in the field of compact micro-optical systems. This includes optical data transmission in waveguides and free-space, compact optical imaging systems and many other areas of optical engineering." "Graduate students will also find it a very useful introduction to this large and rapidly expanding field. It covers major techniques and describes methods for each, providing much 'how-to-do' information."--BOOK JACKET.Title Summary field provided by Blackwell North America, Inc. All Rights Reserved