Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology |
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| Author:
| Nonogaki, Saburo
Takumi, Ueno
Ito, Toshio |
| ISBN: | 978-0-8247-9951-9 |
| Publication Date: | Jun 1998 |
| Publisher: | CRC Press LLC
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| Book Format: | Hardback |
| List Price: | USD $255.00 |
Book Description:
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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials. "
"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials. "