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Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII

22-24 January 2007, San Jose, California, USA

Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII( )
Author: Maher, Mary
Ann Suleski, Thomas
Johnson, Eric
Stewart, Harold
Chiao, Jung-Chih
Nordin, Gregory
Series title:Proceedings of SPIE Ser.
ISBN:978-0-8194-6575-7
Publication Date:Feb 2007
Publisher:SPIE
Book Format:Undefined
List Price:Contact Supplier contact
Book Description:

Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.



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